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Magnetron Sputter version of Opera finite element analysis toolsuite

Cobham Technical Services has launched the first comprehensive simulation solution for designing magnetron sputter coaters. The new software tool provides precision simulation of the complete sputtering process, offering a highly practical means of improving sputter target utilisation, plasma formation and thin film deposition.The new software – the latest application design option in the company’s renowned Opera finite element analysis multi-physics suite for electromagnetic design – has the potential to save hundreds of millions of dollars a year in this industry segment because of the costs of the high purity materials required in surface coating applications.

The Magnetron Sputter version of Opera provides a complete suite of three-dimensional (3D) tools for the finite element modeling, simulation, analysis and optimisation of magnetron sputtering equipment. This is a development that draws on Cobham’s two decades of simulation expertise and validation in the field of charged particle beams. The new software has been validated prior to release in cooperation with two commercial sputter coating companies, and by thin film experts, and predicts sputter target utilisation to within two percent of actual measured results.

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Posted by: Cobham Technical Services 
 

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